mehdi taybi

[ 1 ] - Modelling of Resonance Frequency of MEMS Corrugated Diaphragm for Capacitive Acoustic Sensors (TECHNICAL NOTE)

In this paper, a new model for resonance frequency of clamped circular corrugated diaphragm has been presented. First, an analytical analyzes has been carried out to derive mathematic expressions for mechanical sensitivity of diaphragm with residual stress. Next by using Rayleigh's method we present mathematical model to calculate the resonance frequency of corrugated diaphragm and investigate ...