Amir Musa Abazari

[ 1 ] - Couple Stress Effect on Micro/Nanocantilever-based Capacitive Gas Sensor

Micro/nanocantilevers have been employed as sensors in many applications including chemical and biosensing. Due to their high sensitivity and potential for scalability, miniature sensing systems are in wide use and will likely become more prevalent in micro/nano-electromechanical systems (M-NEMSs). This paper is mainly focused on the use of sensing systems that employ micro/nano-size cantilever...