mahdieh yari esbouei

[ 1 ] - Simulation and Modeling of a High Sensitivity Micro-electro-mechanical Systems Capacitive Pressure Sensor with Small Size and Clamped Square Diaphragm

This paper proposes a Micro-electro-mechanical (MEMS) capacitive pressure sensor that relies on the movable electrode displaced like a flat plate equal to the maximum center deflection of diaphragm. The diaphragm, movable electrode and mechanical coupling are made of polysilicon, gold and Si3N4, respectively. The fixed electrode is gold and the substrate is Pyrex glass. This proposed method inc...