Soleiman Azizi

[ 1 ] - Quality Factor of Free In-plane Vibration of a Fully Clamped Rectangular Micro-plate

Thermo-elastic damping is a significant dissipation mechanism in high quality factor microstructures. In this paper, thermo-elastic damping of the in-plane vibration of fully clamped rectangular micro-plates has been studied. The governing equation of the micro-plate motion and heat conduction equation were derived. Then, The Galerkin method has been used to solve the coupled heat-displacement ...