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[ 1 ] - استفاده از روش جذب تشدیدی برای اندازه‌گیری چگالی اتم‌های مس در لایه نشانی به روش کندوپاش پلاسمایی

In this paper, the resonance optical absorption method, is used to measure the Cu atoms number density in different power levels of power supply. Atoms are sputtered from a Cu target during plasma magnetron sputtering deposition. For the light source, a commercial Cu hollow cathode lamp is used. For measurement of gas temperature, a small percentage of N2 is added to the gas mixture and the gas...