محمدی‌زاده, محمدرضا

[ 1 ] - اندازه‌گیری ضخامت و زبری لایه‌های نانومتری با استفاده از نمودار شدت فریزهای تداخلی

In the standard optical interference fringes approach, by measuring shift of the interference fringes due to step edge of thin film on substrate, thickness of the layer has already been measured. In order to improve the measurement precision of this popular method, the interference fringes intensity curve was extracted and analyzed before and after the step preparation. By this method, one can ...