سلحشور, مصطفی
گروه پژوهشی فناوری خلأ، سازمان جهاد دانشگاهی صنعتی شریف، تهران
[ 1 ] - تمرکز پرتو الکترونی در میدان مغناطیسی یک منبع تبخیر پرتو الکترونی خمیده
In this paper, the vacuum film deposition through electron beam evaporation has been reviewed and the effect of magnetic field on the operation of this system has been explained. Then, the magnetic field distribution due to magnetic components configuartion of a commercial evaporation source with 270-degree electron beam gun (manufactured by Sharif University Branch of ACECR), has been simulate...
نویسندگان همکار