S Valilou

[ 1 ] - Frequency Response Analysis of a Capacitive Micro-beam Resonator Considering Residual and Axial Stresses and Temperature Changes Effects

This paper presents a study on the frequency response of a capacitive micro-beam resonator under various applied stresses. The governing equation whose solution holds the answer to all our questions about the mechanical behavior is the nonlinear electrostatic equation. Due to the nonlinearity and complexity of the derived equation analytical solution are not generally available; therefore, the ...