Analysis of Motion of Micro-Gripper Exposed to the Electric Field and Thermal Stresses for Using in Micro-Robotics

Micro system technology is a relatively new scientific research that deals with the development and study of properties of materials in micro dimensions. Micro-grippers are widely used in switching, positioning, and assembling micron sized components in micro-robotics. In this study, the static and dynamic behavior of visco-elastic Micro-Tweezers under the thermal and electrostatic field is studied numerically. In order to consider more realistic assumptions, the visco-elastic behavior is investigated and thermal effects are simulated by considering both linear and nonlinear models. Considering Euler-Bernoulli beam theory, governing differential equation of motion are derived. Finally, the effect of different parameters such as the parameter of visco-elastic parameters, the effects of temperature and intensity of the electrostatic field on the dynamic and static characteristics of the Micro-Tweezers have been investigated. The results show that visco-elastic behavior has a significant effect on the dynamic behavior of Micro-Tweezers, and with its increase, the damping of the system increases and the amplitude of the Micro-Tweezers oscillations decreases. The system's damping increases from 0.01 to 0.08, the maximum amplitude of Micro-Tweezers decreases from 0.9 to 0.66.