mansouri, F.
RF MEMS and Bio-Nano Electronics (MBNE) Lab, Department of Electrical Eng., Shahid Bahonar University of Kerman, Kerman, Iran.
[ 1 ] - Synthesis of the Silicon Inverted Nano- Pyramid and Study of Their Self- Cleaning Behavior
In this paper, synthesis of inverted nano-pyramids on a single crystal silicon surface through a simple and cost-effective wet chemical method is surveyed. These structures were synthesized by MACE process using Cu as the assisted metal in the solution of copper nitrate, hydrogen peroxide and hydrofluoric acid for different etching times. FE-SEM images of the samples show that time is an import...
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