Aghil Mosavi
Electerical Engineering, Babol University of Technology
[ 1 ] - Accurate Determination of the Pull-in Voltage for MEMS Capacitive Microphone with Clamped Square Diaphragm
Accurate determination of the pull-in, or the collapse voltage is critical in the design process. In this paper an analytical method is presented that provides a more accurate determination of the pull-in voltage for MEMS capacitive devices with clamped square diaphragm. The method incorporates both the linearized modle of the electrostatic force and the nonlinear deflection model of a clamped ...
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