Mehdi Taybi

Electrical & Computer Engineering, Babol University of Technology

[ 1 ] - The Effect of Corrugations on Mechanical Sensitivity of Diaphragm for MEMS Capacitive Microphone

In this paper the effect of corrugated diaphragm on performance of MEMS microphone is described. The corrugated diaphragm is modeled in order to improve the sensitivity of micromachined silicon acoustic sensor. Analytical analyzes have been carried out to derive mathematic expressions for the mechanical sensitivity and displacement of corrugated diaphragm with residual stress. It is shown that ...

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