Farzad Karami
Mechanical Engineering, Sharif University of Tech
[ 1 ] - Tracking and Shape Control of a Micro-cantilever using Electrostatic Actuation
In this paper the problems of state estimation, tracking control and shape control in a micro-cantilever beam with nonlinear electrostatic actuation are investigated. The system’s partial differential equation of motion is converted into a set of ordinary differential equations by projection method. Observabillity of the system is proven and a state estimation system is designed using extended ...
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