Maryam Norouznejad Jelodar
Electerical Engineering, Babol University of Technology
[ 1 ] - Design of High Sensitivity and Linearity Microelectromechanical Systems Capacitive Tire Pressure Sensor using Stepped Membrane
This paper is focused on a novel design of stepped diaphragm for MEMS capacitive pressure sensor used in tire pressure monitoring system. The structure of sensor diaphragm plays a key role for determining the sensitivity of the sensor and the non-linearity of the output.First the structures of two capacitive pressure sensors with clamped square flatdiaphragms, with different thicknesses are inv...
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