تأثیر لایه‌های مختلف اکسید بر خواص حسگری فیلم آلومینای آندی نانوحفره‌دار

In the present work, anodized aluminum oxide template was prepared by accelerated mild anodization technique in 0.6M phosphoric aside and 175 V, anodization voltage. Pore widening was performed by chemical etching in 0.5M phosphoric acid for 8, 16, 32, 40 minutes. Scanning Electron Microscopy (SEM) images showed the pores, diameter exponentially increases with etching time. By depositing silver contacts on the prepared samples and using an RC circuit for applying impedance spectroscopy, the characteristics of the humidity sensor based on constructed samples were investigated. The maximum response was seen for the sample etched for 40 minutes. For this sample, the detectable threshold of relative moisture was 30% and the response and the recovery time were 8, 2 seconds, respectively