Computer-aided Design (cad) for Integrated Microelectromechanical (mems) Devices
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منابع مشابه
1 Computer - Aided Design for Microelectromechanical Systems ( MEMS )
s With the advancements of MEMS foundry services and CAD tools, MEMS devices can be costeffectively designed and prototyped. Here, four designs that utilize these tools are presented: 1) a flexure design used to reduce the device warpage resulting from the mismatch in thermal expansion coefficients between the device and the substrate for flip-chip bonded MEMS, 2) a digitally positioned micro-m...
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In parallel with the development of new technologies, new device configurations, and new applications for microsensors, microactuators, and microsystems, also referred to as microelectromechanical devices and systems (MEMS), there has arisen a growing need for computer-aided engineering and design systems. There is a wide range of design problems: process simulation, solid-body geometric render...
متن کاملA Vision of Structured CAD for MEMS
Computer-aided design tools tailored for microelectromechanical systems (MEMS) are needed to enable design of complex systems with multiple energy domains. In an analogy to the VLSI design methodology, physical, structural, and behavioral views of MEMS can be formed and coupled together in an integrated toolset. Of key importance is the formation of parameterized MEMS component libraries to sup...
متن کاملMicroelectromechanical systems (MEMS): fabrication, design and applications
Micromachining and micro-electromechanical system (MEMS) technologies can be used to produce complex structures, devices and systems on the scale of micrometers. Initially micromachining techniques were borrowed directly from the integrated circuit (IC) industry, but now many unique MEMS-specific micromachining processes are being developed. In MEMS, a wide variety of transduction mechanisms ca...
متن کاملSolid-based CAPP for surface micromachined MEMS devices
Process planning for a MEMS device is almost always conducted manually by the designer to date. As the structures of MEMS devices become more and more complicated, in order to release the designers from the hard and tedious work and speed up the development of MEMS products, such a situation should be changed. In this study, a solid based CAPP method for surface micromachined MEMS device is pre...
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تاریخ انتشار 2002