Photonic Integration in State-of-the-Art Silicon Electronics Processes
نویسنده
چکیده
Photonic integration within state-of-the-art CMOS and DRAM processes leverages the existing electronic manufacturing infrastructure to minimize cost. Suitable design techniques combined with in-foundry optimization or post-processing have enabled integration within several advanced technologies. !2012 Optical Society of America OCIS codes: (250.5300) Photonic integrated circuits; (200.4650) Optical interconnects
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