A novel gridded retarding field energy analyzer for IEDF measurement
نویسندگان
چکیده
A retarding field energy analyzer (RFEA) has been designed and developed to measure ion energy distribution function (IEDF) in helicon plasma. To design RFEA, determination of shape, size of the analyzer orifice, choice of grid and their separations are discussed. The four grid energy analyzer assembly provides easy access of all internal mechanical components and electrical connections. Fundamental problems regarding acquisition of correct RFEA data and their probable solutions are discussed.
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