Modification of Conductivity and of Mechanical Properties of Electroactive Polymer (EAP) Thin Films by Titanium Ion Implantation
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Metal Ion Implanted Compliant Electrodes in Dielectric Electroactive Polymer (EAP) Membranes
One of the key factors to obtain large displacements and high efficiency with dielectric electroactive polymer (DEAPs) actuators is to have compliant electrodes. Attempts to scale DEAPs down to the mm or micrometer range have encountered major difficulties, mostly due to the challenge of micropatterning sufficiently compliant electrodes. Simply evaporating or sputtering thin metallic films on e...
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