Benzocyclobutene (BCB) Based Intracortical Neural Implant
نویسندگان
چکیده
Absfracf-Photosensitive benzocyclobutene (photo-BCB) is a class of photoimagable polymers developed for microelectronics under the trade name CycloteneTM with properties that we believe make it an attractive candidate for chronic implant applications. We report for the first time a complete microfabrication process of BCB polymer-based intracortical neural implant for chronic application. The new design of the implant provides flexibility for micro-motion compliance at the braidimplant interface and the necessary stiffness for better surgical handling. We have demonstrated that the implant with a silicon backbone layer of 5-10pm is robust enough to penetrate the pia without buckling, a major drawback with polymer. The averaged impedance value at lKHz was -250 KR.
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