Wafer-surface flattening control using a wafer deforming chuck driven by piezoelectric actuators.
نویسندگان
چکیده
منابع مشابه
Multivariable Lqg Vibration Control Using Charge-driven Piezoelectric Actuators
Piezoelectric actuators are known to exhibit hysteresis when driven at relatively large voltages. In most situations this phenomenon is detrimental. Electric charge is known to naturally reduce the effects of hysteresis. The interaction of charge driven piezoceramics with flexible structures is analyzed and reveals that the dynamics of the system are different from the voltage driven case. A pr...
متن کاملCharacterization of Piezoelectric Wafer Active Sensors
In the beginning, the classical one-dimensional analysis of piezoelectric active sensors is reviewed. The complete derivation for a free-free sensor is then extended to cover the cases of clamped and elastically constrained sensors. An analytical model based on structural vibration theory and theory of piezoelectricity was developed and used to predict the electro-mechanical (E/M) impedance res...
متن کاملWafer Stage Motion Control
Wafer manufacturing Industries uses conventional controller, but in order to control the position in sub nanometer range conventional controller is not suitable, why because Tuning and augmenting the controller becomes difficult and expensive. So a robust controller is designed for wafer manufacturing system. The controller design in this paper is performed for the translational x and y DOFs in...
متن کاملControl in Semiconductor Wafer Manufacturing
A semiconductor wafer undergoes a wide range of processes before it is transformed from a bare silicon wafer to one populated with millions of transistor circuits. Such processes include Physical or Chemical Vapor Deposition, (PVD, CVD), Chemical-Mechanical Planarization (CMP), Plasma Etch, Rapid Thermal Processing (RTP), and photolithography. As feature sizes keep shrinking, process control pl...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1989
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.55.921