Structure and morphology of epitaxial PbZrO3 films grown by metalorganic chemical vapor deposition
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Structure and morphology of epitaxial PbZrO3 films grown by metalorganic chemical vapor deposition
PbZrO 3 ͑PZ͒ films of different thicknesses have been grown by metalorganic chemical vapor deposition on SrTiO 3 ͑STO͒ substrates. The structure of the films was determined by x-ray diffraction and transmission electron microscopy. At the deposition temperature, the growth is cube on cube and is therefore heteroepitaxial. During cool down, PZ goes through a phase transformation from paraelectric to...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2002
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.1505993