Silver-based reflective coatings for micromachined optical filters
نویسندگان
چکیده
منابع مشابه
Silver-based reflective coatings for micromachined optical filters
Silver films of 40 nm thickness, evaporated on a 300 nm thick low-stress silicon nitride layer, are used as high-quality mirrors operating in the visible and near IR spectral range. Using a silicon nitride membrane under tension, within a square Si frame after bulk micromachining, improves the initial mirror flatness. Two parallel mirrors, with square aperture of up to 2x2 mm and an electrostat...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 1999
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/9/2/314