Robust 3D surface recovery by applying a focus criterion in white light scanning interference microscopy
نویسندگان
چکیده
منابع مشابه
White-light interference microscopy: effects of multiple reflections within a surface film.
The effects of the presence of a transparent thin film on a test surface in white-light interferometric surface profiling are investigated. An expression is obtained for the output intensity variations in a Michelson interferometer which includes the effect of multiple reflections within the thin film. The number of reflections that need to be considered to obtain good convergence to the correc...
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Non-contact optical techniques for 3D surface data acquisition like short coherence (white light) interferometry, optical profilers or fringe projection are well established for applications with low surface complexity, where the average surface roughness amplitude is small and neglectable compared to the form amplitudes or where the aspect ratios of amplitudes and spacings are small. In genera...
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ژورنال
عنوان ژورنال: Applied Optics
سال: 2018
ISSN: 1559-128X,2155-3165
DOI: 10.1364/ao.58.00a101