Plasma enhanced metalorganic chemical vapor deposition of amorphous aluminum nitride
نویسندگان
چکیده
منابع مشابه
Surface Chemical States of Heteroepitaxial Nitride Films on Sapphire by Metalorganic Chemical Vapor Deposition
Surface chemical states of GaN, AlGaN and InGaN by metalorganic chemical vapor deposition, and the influence of different dopants are studied with X-ray Photoelectron Spectroscopy (XPS). The results show that for most of the samples the N 1s peak can be fitted with a dominant GaN peak and a small N–H peak, while Ga 3d can be deconvoluted into three peaks from elemental Ga, GaN and Ga2O3. Si-dop...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2001
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.1413484