KrF excimer laser lithography technology for 64M DRAM.
نویسندگان
چکیده
منابع مشابه
Characterisation of dentin surfaces processed with KrF excimer laser radiation.
In the present work, the surface microtexture and chemical changes induced in human dentin by laser processing with KrF excimer laser radiation using fluences ranging from 0.5 to 20 J/cm2 were studied by SEM, XPS and FTIR. Two distinct behaviours were observed in the evolution of surface topography. In some samples, the laser-treated surface remained flat, independently of the fluence used. It ...
متن کاملAnalysis of photodecomposition of gaseous chlorobenzene by KrF excimer laser.
Gaseous monochlorobenzene was irradiated with KrF excimer laser (248 nm) under reduced pressure. The photodecomposition was an apparent first order reaction. When the system contained no additive gas, the photolysis was found to give benzene (conversion yield: 49%) in the gas phase and many unidentified products in the solid phase. On the other hand, in the presence of oxygen, carbon dioxide (1...
متن کاملPreparation of Ultrafine Fe–Pt Alloy and Au Nanoparticle Colloids by KrF Excimer Laser Solution Photolysis
We prepared ultrafine Fe-Pt alloy nanoparticle colloids by UV laser solution photolysis (KrF excimer laser of 248 nm wavelength) using precursors of methanol solutions into which iron and platinum complexes were dissolved together with PVP dispersant to prevent aggregations. From TEM observations, the Fe-Pt nanoparticles were found to be composed of disordered FCC A1 phase with average diameter...
متن کاملEffects of KrF „248 nm... excimer laser irradiation on electrical and optical properties of GaN:Mg
The electrical and optical characteristics of GaN:Mg irradiated by a pulsed KrF ~248 nm! excimer laser have been studied. When an as-grown Mg-doped GaN film was irradiated by an excimer laser at an energy density of 590 mJ/cm in a nitrogen atmosphere, the hole concentration was drastically increased up to 4.42310 cm. Furthermore, a GaN:Mg thin film, which was treated by laser irradiation follow...
متن کاملInnovations in Excimer Laser Refractive Technology – Focus on the WaveLight® EX500 Excimer Laser System
Excimer laser refractive surgery aims to correct lower order eye aberrations such as myopia, astigmatism and hyperopia by altering the shape of the corneal curvature through the ablation of corneal tissue. Early excimer systems were associated with concerns over post-operative complications, such as night-time driving problems, glare and halos. Furthermore, it was difficult to prevent or treat ...
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ژورنال
عنوان ژورنال: Journal of Photopolymer Science and Technology
سال: 1991
ISSN: 0914-9244,1349-6336
DOI: 10.2494/photopolymer.4.361