Humidity Sensor Based-on Quartz Crystal Microbalance of Sprayed Silver Nanoparticles Films

Abstract The silver nanoparticles (Ag NPs) film was prepared in this work by the electrostatic spray deposition technique. Ag NPs properties were characterized X-ray diffraction, UV-visible spectrophotometer, Raman spectroscopy, and scanning electron microscope. Then, on a 2 MHz crystal microbalance to fabricate humidity sensor. measurement systems are composed of fabricated sensor, oscillator circuit, frequency counter. sensor performances obtained terms shift device at various levels. conditions saturated salt solutions following NIST standard used as values for measurement. It found that exhibited approximately 25 Hz range 11-93 %RH. Moreover, demonstrated low hysteresis value about 1%RH with level 43