FIB Sample Preparation of Thin Films and Soft Materials
نویسندگان
چکیده
منابع مشابه
FIB Sample Preparation of Polymer Thin Films on Hard Substrates Using the Shadow-FIB Method
Focused ion beam (FIB) instrumentation has proven to be extremely useful for preparing cross-sectional samples for transmission electron microscopy (TEM) investigations. The two most widely used methods involve milling a trench on either side of an electron-transparent window: the “H-bar” and the “lift-out” methods [1]. Although these two methods are very powerful in their versatility and abili...
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Preparation of Transmission Electron Microscope (TEM) samples by Focused Ion Beam (FIB) milling is one of the most precise techniques now routinely used for example in failure analysis or material science. These TEM samples are commonly prepared using Ga FIB technology, starting more than 20 years ago [13]. Presently FIB columns are commonly combined with the Scanning Electron Microscopy (SEM) ...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2009
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927609096779