Fabrication of AZO and FAZO films using low-cost spin-coating method

This paper proposes a spin coating method to investigate the use of Al-doped ZnO (AZO) and F, Al co-doped (FAZO) films using zinc acetate as source aluminum nitrate ammonia fluoride dopant. Different processing temperatures have been conducted in-depth research on AZO FAZO thin film structures, morphology photoelectric properties. The results show that for film, intensity (002) diffraction peak (DP) first increases then decreases with temperature, while DP gradually effectively improving thermal stability prepared film. With incorporation optimum growth along c -axis perpendicular substrate surface is promoted, grain size increases. Meanwhile, introduction F inhibits generation interstitial Zn atoms, O vacancy, vacancy; reduces adsorption –CO 3 , H 2 O, OH − surface; significantly improves stability. electrical resistivity ( ρ ) values at 450 °C are 3.32 × 10 −3 Ωcm 5.66 Ωcm, respectively, average transmittance (T A within range 380–1600 nm 92.84% 88.65%, respectively. • doped were by sol–gel coating. Good properties achieved. Over in optical was