Controlling the profile of high aspect ratio gratings in diamond
نویسندگان
چکیده
منابع مشابه
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High Aspect Ratio Si Etching in STS2
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ژورنال
عنوان ژورنال: Diamond and Related Materials
سال: 2016
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2015.08.007