A compact capacitive pressure transducer

Versatile and compact capacitive dilatometer

We describe the design, construction, calibration, and operation of a relatively simple differential capacitive dilatometer suitable for measurements of thermal expansion and magnetostriction from 300 to below 1K with a low-temperature resolution of about 0.05Å. The design is characterized by an open architecture permitting measurements on small samples with a variety of shapes. Dilatometers of...

Development of a Novel Transparent Flexible Capacitive Micromachined Ultrasonic Transducer

This paper presents the world's first transparent flexible capacitive micromachined ultrasonic transducer (CMUT) that was fabricated through a roll-lamination technique. This polymer-based CMUT has advantages of transparency, flexibility, and non-contacting detection which provide unique functions in display panel applications. Comprising an indium tin oxide-polyethylene terephthalate (ITO-PET)...

Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study

Finite Element Modeling of a Capacitive Micromachined Ultrasonic Transducer

Transducers based on piezoelectric crystals dominate the biomedical ultrasonic imaging field. However, fabrication difficulties for piezoelectric transducers limit their usage for complex imaging modalities such as 2D imaging, high frequency imaging, and forward looking intravascular imaging. Capacitive micromachined ultrasonic transducers (CMUTs) have been proposed to overcome these limitation...

Chemical vapor detection using a capacitive micromachined ultrasonic transducer.

Distributed sensing of gas-phase chemicals using highly sensitive and inexpensive sensors is of great interest for many defense and consumer applications. In this paper we present ppb-level detection of dimethyl methylphosphonate (DMMP), a common simulant for sarin gas, with a ppt-level resolution using an improved capacitive micromachined ultrasonic transducer (CMUT) as a resonant chemical sen...